High purity NH₃
순도
- 4N ( 99.99%)데이터
- 분자량 (17.03)용기
- 47L cylinder규격
- H₂O< 60ppb - N₂< 10ppb - CO< 10ppb - CO₂< 10ppb - As CH₄< 10ppb - H₂< 10ppb - O₂ + Ar< 10ppb * 7N Gas PhaseHigh purity Cl₂
순도
- 5N (99.999%)데이터
- 분자량 (70.906)용기
- 47L cylinder규격
- H₂O< 1ppm - N₂< 1ppm - CO< 0.5ppm - CO₂< 0.5ppm - As CH₄< 0.5ppm - H₂< 0.1ppm - O₂ + Ar< 0.5ppm * 5N5